Photoinduced and thermal stress in silicon microcantilevers

Applied Physics Letters

Volumn 73, Issue 16, 1998, Pages 2319-2321

  Datskos, Panos G ^a,b   Rajic, Slobodan ^a   Datskou, Irene ^c  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

^c Environmental Engineering Group   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010758026     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121809     Document Type: Article

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