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Volumn 5406, Issue PART 2, 2004, Pages 447-453
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Performance limits of uncooled VO X microbolometer focal plane arrays
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Author keywords
And Performance; Infrared; Microbolometer; Uncooled
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Indexed keywords
BOLOMETER BRIDGE;
MICROMACHINING TECHNIQUES;
TEMPERATURE COEFFICIENT OF RESISTANCE (TCR);
UNCOOLED VOX MICROBOLOMETERS FOCAL PLANE ARRAYS (FPA);
ARRAYS;
CMOS INTEGRATED CIRCUITS;
ELECTRIC RESISTANCE;
HIGH TEMPERATURE EFFECTS;
IMAGING SYSTEMS;
INTEGRATED CIRCUITS;
SCANNING ELECTRON MICROSCOPY;
THERMOGRAPHY (IMAGING);
BOLOMETERS;
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EID: 10044275465
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.542482 Document Type: Conference Paper |
Times cited : (87)
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References (4)
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