Temperature dependence for in-use stiction of polycrystalline silicon MEMS cantilevers

Sensors and Actuators, A: Physical

Volumn 113, Issue 1, 2004, Pages 60-70

  Ali, S Mubassar ^a   Jennings, Jeffrey M ^a   Phinney, Leslie M ^a,b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

In use stiction; MEMS reliability; OTS; Surface adhesion; Surface micromachining

Indexed keywords

ADHESION; ANNEALING; ATOMIC FORCE MICROSCOPY; DEPOSITION; ELECTROSTATIC ACTUATORS; FAILURE ANALYSIS; HEATING; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON; PROBABILITY; RELIABILITY; STICTION; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

IN-USE STICTION; MEMS RELIABILITY; OCTADECYLTRICHLOROSILANE (OTS); SURFACE ADHESION; SURFACE MICROMACHINING;

CANTILEVER BEAMS;

EID: 2942668232     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.01.037     Document Type: Article

References (20)

1. Komvopoulos K. Adhesion and friction forces in microelectromechanical systems: mechanisms measurement surface modification techniques and adhesion theory. J. Adhes. Sci. Technol. 17:2003;477-517.
2. Maboudian R., Howe R.T. Critical review: adhesion in surface micromachined structures. J. Vac. Sci. Technol. B. 15:1997;1-20.
3. V. Kaajakari, S.-H. Kan, L.-J. Lin, A. Lal, M. Rodgers, Ultrasonic actuation for MEMS dormancy-related stiction reduction, in: Proceedings of SPIE, MEMS Reliability for Critical Applications, Santa Clara, 2000, pp. 60-65.
4. Guckel H., Sniegowski J.J., Christenson T.R., Mohney S., Kelly T.F. Fabrication of micromechanical devices from polysilicon films with smooth surfaces. Sens. Actuators. 20:1989;117-120.
5. G.T. Mulhern, D.S. Soane, R.T. Howe, Supercritical carbon dioxide drying of microstructures, in: Proceedings of International Conference on Solid State Sensors and Actuators, 1993, pp. 296-299.
6. K. Fushinobu, Stiction Recovery of Microcantilevers by Using Excimer Laser Irradiation, in: Proceedings of Seventh Joint Thermophysics and Heat Transfer Conference, AIAA-98-2762, Albuquerque, 1998.
7. Phinney L.M., Rogers J.W. Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantilevers. J. Adhes. Sci. Technol. 17:2003;603-622.
8. Gogoi B.P., Mastrangelo C.H. Adhesion release and yield enhancement of microstructures using pulsed Lorentz forces. J. Microelectromech. Syst. 4:1995;185-192.
9. C.H. Mastrangelo, C.H. Hsu, A simple experimental technique for the measurement of the work of adhesion of microstructures, in: Proceedings of IEEE Solid State Sensor Actuator Workshop, 1992, pp. 208-212.
10. M.R. Houston, R. Maboudian, R.T. Howe, Self-assembled monolayer films as durable anti-stiction coatings for polysilicon microstructures, in: Proceedings of Solid State Sensor and Actuator Workshop, Hilton Head, South Carolina, 1996, pp. 42-47.
11. J.M. Jennings, L.M. Phinney, The effects of temperature on surface adhesion in MEMS structures, in: Proceedings of the SPIE, MEMS Reliability for Critical Applications, Santa Clara, 2000, pp. 66-75.
12. S.M. Ali, L.M. Phinney, Use of thermal cycling to reduce adhesion of OTS coated MEMS cantilevers, in: Proceedings of the SPIE, Reliability, Testing, and Characterization of MEMS/MOEMS II, San Jose, CA, 2003, pp. 151-162.
13. D.A. Koester, R. Mahadevan, B. Hardy, K.W. Markus, MUMPs Design Handbook, revision 6.0, Cronos Integrated Microsystems, 2001.
14. Srinivasan U., Houston M.R., Howe R.T., Maboudian R. Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines. J. Microelectromech. Syst. 7:1998;252-259.
15. De Boer M.P., Michalske M.P. Accurate method for determining adhesion of cantilever beams. J. Appl. Phys. 86:1999;817-827.
16. De Boer M.P., Knapp J.A., Michalske T.A., Srinivasan U., Maboudian R. Adhesion hysteresis of silane coated microcantilevers. Acta Mater. 48:2000;4531-4541.
17. R.L. Alley, G.J. Cuan, R.T. Howe, K. Komvopoulos, The effect of release etch processing on surface microstructure stiction, in: Proceedings of the IEEE Solid State Sensor and Actuator Workshop, 1992, pp. 202-207.
18. M.T. Dugger, R.J. Hohlfelder, D.E. Peebles, Degradation of monolayer lubrication for MEMS, in: Proceedings of the SPIE, Reliability, Testing, and Characterization of MEMS/MOEMS II, San Jose, CA, 2003, pp. 138-150.
19. C. Cabuz, Dielectric related effects in micromachined electrostatic actuators, in: Proceedings of the Conference on Electrical Insulation and Dielectric Phenomena, Austin, 1999, pp. 327-332.
20. Calistri-Yeh M., Kramer E.J., Sharma R., Zhao W., Rafailovich M.H., Sokolov J., Brock J.D. Thermal stability of self-assembled monolayers from alkylchlorosilanes. Langmuir. 12:1996;2747-2755.