Performance characterization of in-plane electro-thermally driven linear microactuators

Journal of Intelligent Material Systems and Structures

Volumn 17, Issue 10, 2006, Pages 919-929

  Lai, Yongjun ^a,c   Bordatchev, Evgueni V ^a   Nikumb, Suwas K ^a   Hsu, Wensyang ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c QUEEN S UNIVERSITY   (Canada)

Author keywords

Electro thermal actuation; In plane motions; Laser fabrication; Microactuator; Static and dynamic electro mechanical performance

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC RESISTANCE; GRIPPERS; LASER THEORY; MICROMACHINING; OPTICAL SHUTTERS; OPTIMIZATION;

DYNAMIC ELECTRO-MECHANICAL PERFORMANCE; ELECTRO-THERMAL ACTUATION; INTEGRATED MICROSYSTEM; MICROROBOTIC DEVICES;

MICROACTUATORS;

EID: 33746299863     PISSN: 1045389X     EISSN: 15308138     Source Type: Journal    
DOI: 10.1177/1045389X06061770     Document Type: Article

References (28)

1. Bordatchev, E., Nikumb, S. and Hsu, W. 2002. "Fabrication of Long-stretch Microdrive for MEMS Applications by Ultra Precision Laser Micromachining," In: Proceedings of the Canada-Taiwan Workshop on Advanced Manufacturing Technologies, September 23-24, London, Ontario, Canada, pp. 243-251.
2. Bordatchev, E. V. and Nikumb, S. K. 2005. "Electro-thermally Driven Microgrippers for MEMS Applications," Journal of Microlithography, Microfabrication, and Microsystems, 4 (2). 023011-023011, 7-7 pp.
3. Bordatchev, E., Nikumb, S. and Hsu, W. 2004. "Laser Micromachining of the Miniature Functional Mechanisms, in Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education," In: Proceedings of SPIE, SPIE, Bellingham, WA, Vol. 5578, pp. 579-588.
4. Braun, A. and Zimmer, K. 2001. "Fabrication of MEMS Structures by Laser Micromachining," In: Proceedings of SPIE, Vol. 4236, pp. 213-221.
5. Comtois, J., Bright, V. and Phipps, M. 1995. "Thermal Microactuators for Surface-micromachining Processes," Processing of the SPIE, 2642: 10-21.
6. Cragun, R. and Howell, L. L. 1999. "Linear Thermal-Mechanical Microactuators," ASME, IMECE MEMS, pp. 181-188.
7. Cverna, F. 2002. Thermal Properties of Metals, ASM International, Materials Park, Ohio, ISBN: 0-87170-768-3.
8. Debeda, H., Freyhold, T., Mohr, J., Wallrabe, U. and Wengelink, J. 1999. "Development of Miniaturized Piezoelectric Actuators for Optical Applications Realized Using LIGA Technology," J. MEMS, 8 (3). 258-263.
9. Gianchandani, Y. B. and Najafi, K. 1996. "Bent-beam Strain Sensors," J. Micromech. Microeng., 5 (1). 52-58.
10. Grade, J., Jerman, H. and Kenny, T. 2003. "Design of Large Deflection Electrostatic Actuators," J. MEMS, 12 (3). 335-343.
11. Guckel, H., Klein, J., Christerson, T., Skrobis, K., Laudon, M. and Lovell, E. G. 1992. "Thermo-magnetic Metal Flexure Actuators," In: Technical Digest, Solid State Sensors and Actuators Workshop, Hilton Head, SC, pp. 73-75.
12. Harness, T. and Syms, R. R. A. 2000. "Characteristic Modes of Electrostatic Comb-drive X-Y Microactuators," Journal of Micromechanics and Microengineering, 10: 7-14.
13. Hickey, R., Kujath, M. and Hubbard, T. 2002. "Heat Transfer Analysis and Optimization of Two-beam Microelectromechanical Thermal Actuators," J. Vac. Sci. Technol. A, 20: 971-974.
14. Hsu, T.-R. 2002. MEMS & Microsystems: Design and Manufacturing, McGraw-Hill, New York.
15. Hsu, C., Tai, W. and Hsu, W. 2002. "Design and Analysis of an Electro-thermally Driven Long-stretch Micro Drive with Cascaded Structure," In: Proceedings of IMECE2002 ASME International Mechanical Engineering Congress and Exposition, November 17-22, 2002, New Orleans, Louisiana, USA, pp. 235-240.
16. Huang, Q. and Lee, K. 1999. "Analysis and Design of Polysilicon Thermal Flexure Actuator," J. Micromech. Microeng., 9: 64-70.
17. Juvinall, R. and Marshek, K. 1991. Fundamentals of Machine Components Design, 2nd edn, John Wiley & Sons, Inc., pp. 186-190.
18. Klaassen, E. H., Peterson, K., Noworolski, M., Logan, J., Maluf, N., Brown, J., Storment, C., McCulley, W. and Kovacs, G. 1995. "Silicon Fusion Bonding and Deep Reactive Ion Etching: A New Technology for Microstructures Transducers'95," In: 8th Int. Conf. on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, pp. 25-29.
19. Koester, D.A., Mahadevan, R., Hardy, B. and Markus, K. MUMPs Design Handbook, Revision 7.0 (Triangle Park, NC: Cronos Integrated Microsystems).
20. Lai, Y., McDonald, J., Kujath, M. and Hubbard, T. 2004. "Force, Deflection and Power Measurements of Toggled Micro Thermal Actuators," J. Micromech. Microeng., 14: 49-56.
21. Luo, J. K., Flewitt, A. J., Spearing, S. M., Fleck, N. A. and Milne, W. I. 2004. "Modelling of Microspring Thermal Actuator," In: Proceedings of the NSTI Nanotechnology Conference and Trade Show, pp. 355-358.
22. Luo, J. K., Flewitt, A. J., Spearing, S. M., Fleck, N. A. and Milne, W. I. 2005. "Three Types of Planar Structure Microspring Electro-thermal Actuators with Insulating Beam Comstrains," J. Micromech. Microeng., 15: 1527-1535.
23. Que, L., Park, J. and Gianchandani, Y. B. 2001a. "Bent-beam Electrothermal Actuators: Part I. Single Beam and Cascaded Devices," J. MEMS, 10: 247-254.
24. Que, L., Park, J.-S. and Gianchandani, Y. B. 2001b. "Bent-Beam Electrothermal Actuators - Part I: Single Beam and Cascaded Devices," J. Micromech. Microeng., 10 (2). 247-253.
25. Sinclair, M. J. 2000. "AHighForceLowAreaMEMSThermalActuator," In: Inter. Society Conf. on Thermal phenomena, pp. 127-132.
26. Syms, R. R. A., Zou, H. and Stagg, J. 2004. "Robust Latching MEMS Translation Stages for Microoptical Systems," J. Micromech. Microeng., 14: 667-674.
27. Williams, K., Maluf, N., Fuller, N., Barron, R., Jaeggi, D. and van Drieenhuizen, B. 1999. "A Silicon Microvalve for the Proportional Control of Fluids," In: 10th Int. Conf. on Solid-state Sensors and Actuators (Transducers' 99), Sendai, Japan, pp. 1804-1807.
28. Ye, W., Mukherjee, S. and MacDonald, N. 1998. "Optimal Shape Design of an Electrostatic Comb Drive in Microelectromechanical Systems," J. MEMS, 7 (1). 16-26.