Fabrication of MEMS structures by laser machining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4236, Issue , 2001, Pages 213-221

  Braun, A ^a   Zimmer, K ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Contour mask; Excimer laser ablation; Gray scale mask; Projection mask technique

Indexed keywords

DIFFRACTION GRATINGS; EXCIMER LASERS; IMAGING SYSTEMS; LASER ABLATION; LASER BEAMS; MASKS; MICROMACHINING; POLYCARBONATES; QUARTZ;

GRAY SCALE MASKS; LASER MACHINING; PROJECTION MASK TECHNIQUES;

MICROELECTROMECHANICAL DEVICES;

EID: 0035015839     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.418759     Document Type: Conference Paper

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