Electro-thermally driven microgrippers for microelectro-mechanical systems applications

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 2, 2005, Pages 1-7

  Bordatchev, Evgueni V ^a   Nikumb, Suwas K ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Design; Electro thermally driven; Laser microfabrication; MEMS; Microgripper; Performance testing

Indexed keywords

ACTUATORS; LITHOGRAPHY; PARAMETER ESTIMATION; SOFTWARE PROTOTYPING;

ELECTRO-THERMALLY DRIVEN; LASER MICROFABRICATION; MEMS; MICROGRIPPER; PERFORMANCE TESTING;

MICROELECTROMECHANICAL DEVICES;

EID: 24744435185     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1899312     Document Type: Article

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