Robust latching MEMS translation stages for micro-optical systems

Journal of Micromechanics and Microengineering

Volumn 14, Issue 5, 2004, Pages 667-674

  Syms, R R A ^a   Zou, H ^a   Stagg, J ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ANISOTROPY; CHEMICAL BONDS; FLIP FLOP CIRCUITS; MICROOPTICS; MULTILAYERS; OPTICAL FILTERS; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SURFACE TOPOGRAPHY; THERMAL EXPANSION;

LATCHING TRANSLATION; LOAD-CARRYING CAPACITY; MICROOPTOELECTROMECHANICAL SYSTEMS (MOEMS); STRUCTURAL HEIGHT;

MICROELECTROMECHANICAL DEVICES;

EID: 2542479733     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/5/002     Document Type: Article

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