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Frontiers of Physics in China

Volumn 1, Issue 2, 2006, Pages 178-185

Characteristics of single and dual radio-frequency (RF) plasma sheaths

(2) Dai, Zhong Ling a Wang, You Nian a

a DALIAN UNIVERSITY OF TECHNOLOGY (China)

Author keywords

Fluid model; Monte Carlo method; Plasma; Ratio frequency; Sheath; Simulation

Indexed keywords

EID: 33746124168 PISSN: 16733487 EISSN: 16733606 Source Type: Journal
DOI: 10.1007/s11467-006-0001-4 Document Type: Review

Times cited : (1)

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