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Volumn 82, Issue 8, 1997, Pages 3689-3709

Dynamics of collisionless rf plasma sheaths

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001290374     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365732     Document Type: Article
Times cited : (134)

References (45)
  • 20
    • 0345630683 scopus 로고
    • Sandia National Laboratories Technical Report No. SAND95-0775 UC-401, printed May
    • Merle E. Riley, "Unified Model of the rf Plasma Sheath," Sandia National Laboratories Technical Report No. SAND95-0775 UC-401, printed May 1995.
    • (1995) Unified Model of the Rf Plasma Sheath
    • Riley, M.E.1
  • 24
    • 0025387002 scopus 로고
    • Godyak and Natalia Sternberg
    • Valery A. Godyak and Natalia Sternberg, IEEE Trans. Plasma Sci. 18, 159 (1990).
    • (1990) IEEE Trans. Plasma Sci. , vol.18 , pp. 159
    • Valery, A.1
  • 32
    • 0012787931 scopus 로고
    • 2) for the QSS case in terms of the smallness parameter defined in Eq. (12)
    • 2) for the QSS case in terms of the smallness parameter defined in Eq. (12).
    • (1982) Phys. Lett. , vol.89 A , pp. 80
    • Godyak, V.A.1
  • 38
    • 85033167600 scopus 로고    scopus 로고
    • note
    • Those components in the model were not shielded from signals below the operating frequency. Consequently, they did affect subharmonic generation, which occurred in the model at somewhat higher excitation levels than were tested in the experiment.
  • 39
    • 85033188286 scopus 로고    scopus 로고
    • note
    • The authors are willing to share the source code in FORTRAN that solves a sample tutorial sheath and circuit problem, and the source code in C++ that was used for the comparison with the experimental results.
  • 44
    • 85033169503 scopus 로고    scopus 로고
    • Oak Ridge National Laboratory (private communication)
    • This was first pointed out to us by Lee A. Berry, Oak Ridge National Laboratory (private communication).
    • Berry, L.A.1
  • 45
    • 0002149883 scopus 로고
    • Plasma-Surface Interactions and Processing of Materials, edited by Orlando Auciello, Alberto Gras-Marti, Jose Antonia Valles-Abarca, and Daniel J. Flamm.
    • V. A. Godyak, in Plasma-Surface Interactions and Processing of Materials, edited by Orlando Auciello, Alberto Gras-Marti, Jose Antonia Valles-Abarca, and Daniel J. Flamm. NATO ADI Series E: Appl. Sci. 176, 95 (1990).
    • (1990) NATO ADI Series E: Appl. Sci. , vol.176 , pp. 95
    • Godyak, V.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.