Simulations of ion transport in a collisional radio-frequency plasma sheath

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 69, Issue 3 2, 2004, Pages

  Dai, Zhong Ling ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DECOMPOSITION; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; ELECTRODES; EQUIVALENT CIRCUITS; MONTE CARLO METHODS; PLASMA ETCHING; PLASMA SOURCES; POISSON EQUATION; POTENTIAL ENERGY; SURFACE TOPOGRAPHY;

AZIMUTHAL ANGLES; ION ANGULAR DISTRIBUTIONS (IAD); ION ENERGY DISTRIBUTIONS (IED); PLASMA BOUNDARIES;

PLASMA SHEATHS;

EID: 42749106272     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.69.036403     Document Type: Article

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