Two-dimensional fluid simulation of collisional plasma sheath over rf powered electrode with cylindrical hole

Plasma Science and Technology

Volumn 6, Issue 4, 2004, Pages 2404-2410

  Hou, Lujing ^a   Wang, Younian ^a   Miskvic, Z L ^b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Dusty plasma; Numerical simulation; Two dimensional sheath

Indexed keywords

DUSTY PLASMA; GAS PRESSURES; SHEATH DYNAMICS; TWO-DIMENSIONAL SHEATHS;

COMPUTER SIMULATION; ELECTRODES; EQUIVALENT CIRCUITS; FLUID DYNAMICS; PLASMA COLLISION PROCESSES; POISSON EQUATION;

PLASMA SHEATHS;

EID: 33746141733     PISSN: 10090630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-0630/6/4/012     Document Type: Article

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