Two-dimensional radio-frequency sheath dynamics over a nonflat electrode with perpendicular magnetic field

Physics of Plasmas

Volumn 11, Issue 9, 2004, Pages 4456-4461

  Hou, Lu Jing ^a   Wang, You Nian ^a   Miskovic Z L ^b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DISCHARGE (FLUID MECHANICS); DUST; ELECTRIC FIELD EFFECTS; ELECTRODES; IONS; MAGNETIC FIELD EFFECTS; MICROELECTROMECHANICAL DEVICES; MOLDING; VARIATIONAL TECHNIQUES; VELOCITY MEASUREMENT;

AZIMUTHAL ION FLOW; DUSTY PLASMAS; PLASMA MOLDING; SHEATH DYNAMICS;

PLASMA SHEATHS;

EID: 5444228259     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1781164     Document Type: Article

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