Plasma molding over surface topography: Simulation of ion flow, and energy and angular distributions over steps in RF high-density plasmas

IEEE Transactions on Plasma Science

Volumn 30, Issue 5 II, 2002, Pages 2048-2058

  Kim, Doosik ^a   Economou, Demetre J ^a  

^a University of Houston   (United States)

Author keywords

Energetic neutrals; Monte Carlo simulation; Plasma simulation; Sheath over steps; Two dimensional sheath

Indexed keywords

MONTE CARLO METHODS; PLASMA FLOW; PLASMA SHEATHS; SURFACE TOPOGRAPHY;

ANGULAR DISTRIBUTIONS; HIGH-DENSITY PLASMAS; ION FLOW; PLASMA MOLDING;

PLASMA SIMULATION;

EID: 0036826715     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2002.805326     Document Type: Article

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