An infrared study of the surface chemistry of titanium nitride atomic layer deposition on silica from TiCl4 and NH3

Thin Solid Films

Volumn 514, Issue 1-2, 2006, Pages 97-102

  Snyder, Mark Q ^a   McCool, Benjamin A ^b   DiCarlo, Joseph ^d   Tripp, Carl P ^b,c   DeSisto, William J ^a,b  

^a The University of Maine   (United States)

^b UNIVERSITY OF MAINE   (United States)

^c NONE   (United States)

^d Yardney Technical Products Inc   (United States)

Author keywords

Atomic layer deposition; Fourier transform infrared spectroscopy; Surface chemistry; Surface composition; Titanium nitride

Indexed keywords

DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FUSED SILICA; INFRARED RADIATION; SURFACE CHEMISTRY; SURFACE STRUCTURE;

ATOMIC LAYER DEPOSITION; DIFFUSE REFLECTANCE; SURFACE SPECIES;

TITANIUM NITRIDE;

EID: 33745751660     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.03.013     Document Type: Article

References (46)

1. Mochizuki Y., Okamoto Y., Ishitani A., Hirose K., and Takada T. Jpn. J. Appl. Phys., Part 2: Letters 34 (1995) L326
2. De Baynast H., Bouteville A., and Remy J.-C. Chem. Vap. Depos. 6 (2000) 115
3. Musher J.N., and Gordon R.G. J. Electrochem. Soc. 143 (1996) 736
4. Tanaka T., Nakajima T., and Yamashita K. Thin Solid Films 409 (2002) 51
5. Ritala M., Leskelae M., Rauhala E., and Haussalo P. J. Electrochem. Soc. 142 (1995) 2731
6. Winter C.H., Proscia J.W., Rheingold A.L., and Lewkebandara T.S. Inorg. Chem. 33 (1994) 1227
7. Grujicic M., and Lai S.G. J. Mater. Sci. 36 (2001) 2937
8. Ishihara S., and Hanabusa M. J. Appl. Phys. 84 (1998) 596
9. Berry A., Mowery R., Turner N.H., Seitzman L., Dunn D., and Ladouceur H. Thin Solid Films 323 (1998) 10
10. Lim J.-W., Park J.-S., and Kang S.-W. J. Appl. Phys. 87 (2000) 4632
11. Ritala M., Asikainen T., Leskela M., Jokinen J., Lappalainen R., Utriainen M., Niinisto L., and Ristolainen E. Appl. Surf. Sci. 120 (1997) 199
12. Lee Y.J., and Kang S.-W. J. Vac. Sci. Technol., A 21 (2003) L13
13. Kim J., Hong H., Oh K., and Lee C. Appl. Surf. Sci. 210 (2003) 231
14. Elam J.W., Schuisky M., Ferguson J.D., and George S.M. Thin Solid Films 436 (2003) 145
15. Lim J.-W., Park H.-S., and Kang S.-W. J. Electrochem. Soc. 148 (2001) C403
16. Min J.-S., Son Y.-W., Kang W.-G., Chun S.-S., and Kang S.-W. Jpn. J. Appl. Phys., Part 1 37 (1998) 4999
17. Lindblad M., Haukka S., Kytoekivi A., Lakomaa E.-L., Rautiainen A., and Suntola T. Appl. Surf. Sci. 121/122 (1997) 286
18. Haukka S., Lakomaa E.L., and Suntola T. Stud. Surf. Sci. Catal. 120A (1999) 715
19. Kol'tsov S.I., and Aleskovskii V.B. Zhurnal Prikladnoi Fiziki 40 (1967) 907
20. Shevyakov A.M., Kuznetsova G.N., and Aleskovskii V.B. Khim. Vysokotemp. Mater., Tr. Vses. Soveshch., 2nd (1965) 149
21. Sergeeva L.A., Kalinkin I.P., and Aleskovskii V.B. Izvestiya Leningradskogo Elektrotekhnicheskogo Instituta imeni V.I. Ul'yanova 57 (1966) 103
22. Puurunen R.L. J. Appl. Phys. 97 (2005) 121301/1
23. Lakomaa E.L., Haukka S., and Suntola T. Appl. Surf. Sci. 60-61 (1992) 742
24. Haukka S., Lakomaa E.L., Jylha O., Vilhunen J., and Hornytzkyj S. Langmuir 9 (1993) 3497
25. Haukka S., Lakomaa E.L., and Suntola T. Thin Solid Films 225 (1993) 280
26. Haukka S., Lakomaa E.L., and Root A. J. Phys. Chem. 97 (1993) 5085
27. Ferguson J.D., Weimer A.W., and George S.M. Chem. Mater. 12 (2000) 3472
28. Wank J.R., George S.M., and Weimer A.W. Powder Technol. 121 (2001) 195
29. Wank J.R., George S.M., and Weimer A.W. J. Am. Ceram. Soc. 87 (2004) 762
30. Gu W., and Tripp C.P. Langmuir 21 (2005) 211
31. Ninness B.J., Bousfield D.W., and Tripp C.P. Colloids Surf., A 214 (2003) 195
32. Greer F., Fraser D., Coburn J.W., and Graves D.B. J. Vac. Sci. Technol., A 21 (2003) 96
33. Satta A., Schuhmacher J., Whelan C.M., Vandervorst W., Brongersma S.H., Beyer G.P., Maex K., Vantomme A., Viitanen M.M., Brongersma H.H., and Besling W.F.A. J. Appl. Phys. 92 (2002) 7641
34. Peri J.B. J. Phys. Chem. 70 (1966) 2937
35. Satta A., Vantomme A., Schuhmacher J., Whelan C.M., Sutcliffe V., and Maex K. Appl. Phys. Lett. 84 (2004) 4571
36. Tripp C.P., and Hair M.L. Langmuir 7 (1991) 923
37. D.T. Molapo, M.S. Thesis, University of Ottawa, Ottawa, Canada, 1998.
38. Juppo M., Alen P., Ritala M., Sajavaara T., Keinonen J., and Leskela M. Electrochem. Solid-State Lett. 5 (2002) C4
39. Blitz J.P. Colloids Surf. 63 (1992) 11
40. Chapman I.D., and Hair M.L. Trans. Faraday Soc. 61 (1965) 1507
41. Kiselev A.V., and Lygin V.I. Infrared Spectra of Surface Compounds (1975), John Wiley & Sons, Inc., Jerusalem
42. Hamann S.D. Aust. J. Chem. 31 (1978) 919
43. Elers K.-E., Saanila V., Soininen P.J., Li W.-M., Kostamo J.T., Haukka S., Juhanoja J., and Besling W.F.A. Chem. Vap. Depos. 8 (2002) 149
44. Tripp C.P., and Hair M.L. J. Phys. Chem. 97 (1993) 5693
45. Juppo M., Rahtu A., and Ritala M. Chem. Mater. 14 (2002) 281
46. Tompkins H.G. J. Appl. Phys. 70 (1991) 3876