Coating fine nickel particles with Al2O3 utilizing an atomic layer deposition-fluidized bed reactor (ALD-FBR)

Journal of the American Ceramic Society

Volumn 87, Issue 4, 2004, Pages 762-765

  Wank, Jeffrey R ^a   George, Steven M ^b   Weimer, Alan W ^a  

^a UCB 450   (United States)

^b UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM COMPOUNDS; DEPOSITION; EMISSION SPECTROSCOPY; FLUIDIZED BEDS; NITROGEN; PARTICLE SIZE ANALYSIS; THICKNESS CONTROL; TRANSMISSION ELECTRON MICROSCOPY; WATER;

ATOMIC LAYER DEPOSITION; FLUIDIZED BED REACTOR; INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION SPECTROMETRY; TRIMETHYLALUMINUM; ULTRATHIN AND CONFORMAL COATING; WAVELENGTH DISPERSIVE SPECTROMETRY IMAGING; X RAY PHOTOEMISSION SPECTROSCOPY;

NICKEL;

EID: 2342588109     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2004.00762.x     Document Type: Article

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