Surface evolution during crystalline silicon film growth by low-temperature hot-wire chemical vapor deposition on silicon substrates

Physical Review B - Condensed Matter and Materials Physics

Volumn 73, Issue 24, 2006, Pages

  Richardson, Christine Esber ^a   Park, Young Bae ^a   Atwater, Harry A ^a  

^a California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33745421573     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.73.245328     Document Type: Article

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