Surface roughening during low-temperature Si epitaxial growth on singular vs vicinal Si(001) substrates

Physical Review B - Condensed Matter and Materials Physics

Volumn 53, Issue 12, 1996, Pages 7876-7879

  Lee, N ^a   Cahill, David G ^a   Greene, J ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001486101     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.53.7876     Document Type: Article

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