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Volumn 84, Issue 7, 2004, Pages 1093-1095
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Elastic strain relaxation in free-standing SiGe/Si structures
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Author keywords
[No Author keywords available]
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Indexed keywords
ELASTIC STRAIN RELAXATION;
FORCE-BALANCE MODEL;
CHEMICAL VAPOR DEPOSITION;
ELASTICITY;
ELECTRON MOBILITY;
EPITAXIAL GROWTH;
MODULATION;
OXIDATION;
SCANNING ELECTRON MICROSCOPY;
STRAIN;
SILICON;
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EID: 1542784446
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1646464 Document Type: Article |
Times cited : (46)
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References (10)
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