Thermal actuator improvements: Tapering and folding

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 I, Issue , 2003, Pages 237-251

  Sinclair, Michael J ^a   Wang, Kerwin ^b  

^a MICROSOFT RESEARCH   (United States)

^b University of Washington   (United States)

Author keywords

Electrothermal; Microactuator; Thermal actuator; Thermomechanical

Indexed keywords

MICROACTUATORS; STRAIN; THERMAL EXPANSION; TRANSDUCERS;

ELECTROTHERMAL ACTUATION; STRAIN ENERGY; THERMAL ACTUATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0041328120     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.499129     Document Type: Conference Paper

References (8)

1. V. Bright, "Thermal microactuators for surface micromachining processes", SPIE 2642, pp 10-21.
2. M. Sinclair, "A High Force, Low Area MEMS Thermal Actuator", IEEE ITHERM2000, v3, pp. Las Vegas, NV, 2000.
3. D. Koester, R. Mahedevan, A. Shishkoff, and K. Marcus, "MUMPs Design Handbook," rev. 4, Cronos Integrated Microsystems, 3021 Cornwallis Rd, Research Triangle Park, NC 27709, May 1999.
4. C. D. Lott, T. W. McLain, J. N. Harb and L. L. Howell, "Modeling the thermal behavior of a surface-micromachined linear displacement thermomechanical microactuator", Sensors and Actuators A: Physics, v101, 2002, pp 1-12.
5. R. Hickey, D. Sameoto, T. Hubbard and M. Kujath, "Time and frequency response of two-arm micromachined thermal actuators", Journal of Micromechanics and Microengineering, v13, 2003, pp 40-46.
6. L. Lin and M. Chiao, "Electrothermal responses of lineshape microstructures", Sensors and Actuators A: Physics, v55, 1996, pp 35-41.
7. R. Cragun and L. L. Howell, "Linear thermomechanical microactuators", The ASME International Mechanical Engineering Congress and Exposition, Nov, 1999, pp 181-188.
8. T.H. Richards, "Energy methods in stress analysis", p.96, John Wiley & Sons Ins., 1977.