MOS memory using germanium nanocrystals formed by thermal oxidation of Si1-xGex

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 115-118

  King, Ya Chin ^a   King, Tsu Jae ^a   Hu, Chenming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; MOSFET DEVICES; NANOSTRUCTURED MATERIALS; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON COMPOUNDS; THERMOOXIDATION;

CHARGE TRAPS; MOS MEMORIES; QUASINONVOLATILE STORAGE;

SEMICONDUCTOR STORAGE;

EID: 0032256629     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)