Low-resistance ohmic contacts to digital alloys of n-AlGaN/AlN

IEEE Electron Device Letters

Volumn 27, Issue 1, 2006, Pages 22-24

  Yun, J ^a   Choi, K ^a   Mathur, K ^a   Kuryatkov, V ^a   Borisov, B ^a   Kipshidze, G ^a   Nikishin, S ^a   Temkin, H ^a  

^a Texas Tech University   (United States)

Author keywords

AlGaN; GaN; Light emitting diode; Ohmic contact; Superlattices

Indexed keywords

ANNEALING; DEPOSITION; ELECTRON DIFFRACTION; ETCHING; HAFNIUM; HYDROCHLORIC ACID; LIGHT EMITTING DIODES; METALLIZING; OHMIC CONTACTS; SUPERLATTICES;

DIGITAL ALLOYS; LOW CONTACT RESISTANCE; SURFACE PRECLEANING;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 33645463486     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2005.861255     Document Type: Article

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