Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 46, Issue 6, 1999, Pages 1337-1340

  Oralkan, Orncr ^a   Tin, Xuecheng ^a   Dugortckin, Lèvent ^a   Klmri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CAPACITANCE; MICROMACHINING; SENSITIVITY ANALYSIS; SIGNAL RECEIVERS; TRANSMITTERS;

CAPACITATIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT);

ULTRASONIC TRANSDUCERS;

EID: 0033310091     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.808855     Document Type: Article

References (7)

1. M. G. Maginness, J. D. Plummet, W, L. Beaver, and J. D. Meindl, State-of-the-art in two-dimensional ultrasonic array technology, MeA. Pliys., vol. 3, pp. 312-318, 1976.
2. X. C. Jin, I. Ladabmim, and B. T. Khuri-Yakub, The microfabrication of capacitive ultrasonic transducers, IKEE/ASME .!. Mir.rne.le.rAromecli. Syst., vol. 7, pp. 295-302, Sep. 1998.
3. X. C. .Tin, F. L. Dogertekin, S. Calmes, X. J. Zhang, 1. Ladabaum, and B. T. Khuri-Yakub, Micromachined capacitive transducer arrays fur medical ultrasound imaging, iu Proc. IEEE Ultrason. Symp., Sendai, Japan, 1008, pp. 1877-1880.
4. X. C. Jin, I. Ladabiium, I1'. L. Degertekin, S. Calmes, und B. T. Khuri-Yakub, Fabrication and characterization of surface tnicromachined capacitive ultrasonic immersion transducers, IEEB/ASMK J. Microe.ler.tromech. Syst., vol. 8, pp. 100 114, Mar. 100!).
5. X, C. .lin, S. Calmes, C. H. Cheng, F. L. Degortckin, and B. T. Khuri-Yakub, Micromachincd capacitive ultrasonic immersion transducer array, in Dig. Tech. Papers Transducers '00, Sendai, Japan, pp. 1500 1503.
6. W. P. Mason, Electromechanical 7 'mnsducers and Wane. Fille.rfs. New York: Van Nostrand, 1042.
7. I. Ladabaum, X. C. Jin, H. T. Soli. A. Atalar, and B. T. KhuriYakub, Surface rnicromachined capacitive ultrasonic transducers, IEEE Irans. Ultrason, Ferroeler.l., Picq. Contr., vol. 45, pp. 078-689, May 1998.