Fabrication and characterization of a new capacitive micromachined ultrasonic transducer (cMUT) using polysilicon as membrane and sacrificial layer material

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 1951-1954

  Buhrdorf, A ^a   Lohfink, A ^a,b   Junge, S ^a   Eccardt, P C ^b   Benecke, W ^a  

^a UNIVERSITY OF BREMEN   (Germany)

^b SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL MEMBRANES; DOPING (ADDITIVES); FINITE ELEMENT METHOD; HYDROPHONES; IMPLANTS (SURGICAL); MATHEMATICAL MODELS; MICROMACHINING; POLYSILICON; SENSORS; STIFFNESS; STRESSES;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT); RESONANCE FREQUENCY; THERMAL OXIDATION;

ULTRASONIC TRANSDUCERS;

EID: 4143070584     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. P. Eecardt, K. Niederer, and B. Fischer, "Micromachined transducers for ultrasonic applications," in Proceedings of the IEEE Ultrasonic Symposium, October 5-8, Toronto, Canada, 1997.
2. O. Ahrens, D. Hohlfeld, A. Buhrdorf, O. Glitza, and J. Binder, "A new class of capacitive micromachined ultrasonic transducers," in Proceedings of the IEEE Ultrasonic Symposium, October 22-25, San Juan, Puerto Rico, 2000.
3. A. Lohfink, P.-C. Eccardt, W. Benecke, and H.Meixner, "Derivation of a 1d cmut model from fern results for linear and nonlinear equivalent circuit simulation," in Proceedings of the IEEE Ultrasonic Symposium, Honolulu, Hawaii, October 5-8, 2003.
4. K. Niederer, P. Eccardt, H. Meixner, and R. Lerch, "Micromachined transducer design for minimized generation of surface waves," in Proceedings of the IEEE Ultrasonic Symposium, Lake Tahoe, Nevada, October 17-20, 1999.