Capacitive Micromachined Ultrasonic Transducers for Robotic Sensing Applications

IEEE International Conference on Intelligent Robots and Systems

Volumn 3, Issue , 2003, Pages 2347-2352

  Yaralioglu, Goksen G ^a   Ergun, Arif S ^a   Huang, Yongli ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Capacitive Micromachined Ultrasonic Transducers (CMUTs); Robotic; Ultrasonic ranging

Indexed keywords

ULTRASOUND DETECTION;

ACOUSTIC GENERATORS; ELECTROSTATIC DEVICES; MICROMACHINING; PIEZOELECTRIC TRANSDUCERS; PROXIMITY SENSORS; ROBOT APPLICATIONS;

ULTRASONIC TRANSDUCERS;

EID: 0346148667     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. M.I. Haller and B.T. Khuri-Yakub, "A surface micromachined electrostatic ultrasonic air transducer," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 43, no. 1, pp. 1-6, Jan. 1996.
2. X.C. Jin, I. Ladabaum, L. Degertekin, S. Calmes, and B.T. Khuri-Yakub, "Fabrication and characterization of surface micromachined capacitive ultrasonic transducers", IEEE J. Microelectromechanical Systems., vol. 8, no.1, pp. 100-114, March 1999.
3. I. Ladabaum, X.C. Jin, H.T. Sok, A. Atalar, B.T. Khuri-Yakub, "Surface micromachined capacitive ultrasonic transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., Vol. 45, no. 3, pp. 678-690, May 1998.
4. X.C. Jin, I. Ladabaum and B. T. Khuri-Yakub. "The Microfabrication of Capacitive Ultrasonic Transducers", IEEE J. Microelectromechanical Systems., vol. 7, no. 3 p. 295-302, September 1998.
5. F.V. Hunt, Electroacoustics; the analysis of transduction, and its historical background, Cambridge, Harvard University Press, 1954.
6. W.P. Mason, Electromechanical Transducers and Wave Filters, D. Van Nostrand Company Inc., London, 1948.