A capacitance ultrasonic transducer for high-temperature applications

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 7, 2004, Pages 896-907

  Schröer, Andreas ^a   Harasek, Stefan ^a   Kupnik, Mario ^b   Wiesinger, Michael ^c   Gornik, Erich ^a   Benes, Ewald ^a   Gröchl, Martin ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b UNIVERSITY OF LEOBEN   (Austria)

^c AVL LIST GMBH   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

FUNCTIONALITY; INSULATION RINGS; METALLIC MEMBRANES;

CAPACITANCE; ELECTRIC CONDUCTIVITY; ELECTRIC INSULATION; HIGH TEMPERATURE APPLICATIONS; PRODUCT DESIGN; SILICON NITRIDE; SUBSTRATES;

ULTRASONIC TRANSDUCERS;

EID: 3142704240     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1320750     Document Type: Article

References (38)

1. I. Rudnick and M. N. Stein, "Reciprocity free field calibration of microphones to 100 Kc in air," J. Acoust. Soc. Amer., vol. 20, pp. 818-825, 1948.
2. W. Kuhl, G. R. Schodder, and F. K. Schröder, "Condenser transmitters and microphones with solid dielectric for airborne ultrasonics," Acustica, vol. 4, pp. 519-532, 1954.
3. K. Matsuzawa, "Condenser microphones with plastic diaphragms for airborne ultrasonics, I," J. Phys. Soc. Jpn., vol. 13, pp. 1533-1543, 1958.
4. K. Matsuzawa, "Condenser microphones with plastic diaphragms for airborne ultrasonics, II," J. Phys. Soc. Jpn., vol. 15, pp. 167-174, 1960.
5. D. W. Schindel and D. A. Hutchins, "Air coupled ultrasonic transducer," U.S. Patent 5 287 331, Feb. 15, 1994.
6. I. Ladabaum, X. Jin, H. T. Soh, A. Atalar, and B. T. KhuriYakub, "Surface micromachined capacitive ultrasonic transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 45, pp. 678-690, 1998.
7. D. A. Hutchins, A. G. Bashford, W. M. D. Wright, and D. W. Schindel, "Advances in wide bandwidth air-coupled capacitance transducers," in Proc. IEEE Ultrason. Symp., 1995, pp, 981-984.
8. A. Gachagan, G. Hayward, S. P. Kelly, and W. Galbraith, "Characterization of air-coupled transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 43, pp. 678-689, 1996.
9. D. W. Schindel, D. A. Hutchins, L. Zou, and M. Sayer, "The design and characterization of micromachined air-coupled capacitance transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 42, pp. 42-50, 1995.
10. M. Rafiq and C. Wykes, "The performance of capacitive ultrasonic transducers using V-grooved backplates," Meas. Sci. Technol., vol. 2, pp. 168-174, 1991.
11. J. Hietanen, "Closed-form formulation for sensitivity of capacitive ultrasonic transducers using V-grooved backplates," Sens. Actuators A, vol. 69, pp. 139-142, 1998.
12. K. Suzuki, K. Higuchi, and H. Tanigawa, "A silicon electrostatic ultrasonic transducer," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 36, pp. 620-627, 1989.
13. D. W. Schindel and D. A. Hutchins, "Applications of micromachined capacitance transducers in air-coupled ultrasonics and nondestructive evaluation," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 42, pp. 51-58, 1995.
14. M. J. Anderson, J. A. Hill, C. M. Fortunko, N. S. Dogan, and R. D. Moore, "Broadband electrostatic transducers: Modeling and experiments," J. Acoust. Soc. Amer., vol. 97, pp. 262-272, 1995.
15. M. J. Anderson and X. Liu, "Use of reciprocity to characterize ultrasonic transducers in air above 100 kHz," J. Acoust. Soc. Amer., vol. 103, pp. 446-453, 1998.
16. M. I. Haller and B. T. Khuri-Yakub, "A surface micromachined electrostatic ultrasonic air transducer," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 43, pp. 1-6, 1996.
17. R. A. Noble, R. J. Bozeat, T. J. Robertson, D. R. Billson, and D. A. Hutchins, "Novel silicon nitride micromachined wide band-width ultrasonic transducers," in Proc. IEEE Ultrason. Symp., 1998, pp. 1081-1084.
18. A. G. Bashford and D. A. Hutchins, "Non-destructive evaluation of green-state ceramics using micromachined air-coupled capacitance transducers," Ultrasonics, vol. 36, pp. 121-126, 1998.
19. W. M. D. Wright and D. A. Hutchins, "Monitoring of binder removal from injection molded ceramics using air-coupled ultrasound at high temperature," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 46, pp. 647-653, 1999.
20. 2 at very low voltages," IEEE Trans. Electron. Devices, vol. 41, pp. 1227-1232, 1994.
21. W. Kohl, Handbook of Materials and Techniques for Vacuum Devices. New York: AIP Press, 1995.
22. H. Schaumburg, Einführung in die Werkstoffe der Elektrotechnik. Stuttgart: Teubner, 1993. (in German)
23. C. Hamann and M. Stark, Wertekatalog dünne Schichten. KarlMarx-Stadt, Germany: Technische Hochschule Karl-Marx-Stadt, 1979. (in German)
24. H. Schaumburg, Keramik. Stuttgart: Teubner, 1994. (in German)
25. S. M. Sze, Semiconductor Devices, Physics and Technology. New York: Wiley, 1985.
26. R. F. Davis, "III-V nitrides for electronic and optoelectronic applications," Proc. IEEE, vol. 79, pp. 702-712, 1991.
27. E. Savrun and C. Toy, "An aluminum nitride package for 600°C and beyond," in Proc. IEEE High Temperature Electronics Conference, 1998, pp. 265-268.
28. G. Gould and E. A. Irene, "The influence of silicon surface cleaning procedures on silicon oxidation," J. Electrochem. Soc., vol. 134, pp. 1031-1033, 1987.
29. J. Zemanek, "Beam behavior within the nearfield of a vibrating piston," J. Acoust. Soc. Amer., vol. 49, pp. 181-191, 1971.
30. M. Zollner and E. Zwicker, Elektroakustik. 3rd ed. Berlin: Springer, 2003. (in German)
31. R. Moazzami, J. C. Lee, and C. Hu, "Temperature acceleration of time-dependent dielectric breakdown," IEEE Trans. Electron. Devices, vol. 36, pp. 2462-2465, 1989.
32. A. G. Bashford, D. A. Hutchins, and D. W. Schindel, "Radiated fields of an air-coupled ultrasonic capacitance transducer," Ultrasonics, vol. 34, pp. 169-172, 1996.
33. K. Beissner, "Exact integral expression for the diffraction loss of a circular piston source," Acustica, vol. 49, pp. 212-217, 1981.
34. H. E. Bass, L. C. Sutherland, and A. J. Zuckerwar, "Atmospheric absorption of sound: Update," J. Acoust. Soc. Amer., vol. 88, pp. 2019-2021, 1990.
35. H. E. Bass, L. C. Sutherland, A. J. Zuckerwar, D. T. Blackstock, and D. M. Hester, "Atmospheric absorption of sound: Further developments," J. Acoust. Soc. Amer., vol. 97, pp. 680-683, 1995.
36. _, "Erratum: Atmospheric absorption of sound: Further developments," J. Acoust. Soc. Amer., vol. 99, p. 1259, 1996.
37. 2 electrets," in Proc. 8th Int. Symp. Electrets (ISE 8), 1994, pp. 107-112.
38. M. Kupnik, P. O'Leary, A. Schröder, and I. Rungger, "Numerical simulation of ultrasonic transit-time flowmeter performance in high temperature gas flows," in Proc. IEEE Ultrason. Symp., 2003, pp. 1354-1359.