An implementation of a microfluidic mixer and switch using micromachined acoustic transducers

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 104-107

  Jagannathan, H ^a   Yaralioglu, G G ^a   Ergun, A S ^a   Khuri Yakub, B T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; ASPECT RATIO; CHANNEL FLOW; DEPOSITION; ETCHING; GOLD; LAMINAR FLOW; MAGNETRON SPUTTERING; SILICON WAFERS; SILICONES; THIN FILMS; ZINC OXIDE;

MICROFLUIDIC MIXER; MICROFLUIDIC SWITCH; MICROMACHINED ACOUSTIC TRANSDUCER; POLYDIMETHYLSILOXANE;

MICROELECTROMECHANICAL DEVICES;

EID: 0038156105     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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