Negative oxygen ions in a pulsed RF-discharge with inductive coupling in mixtures of noble gases and oxygen

Plasma Sources Science and Technology

Volumn 15, Issue 1, 2006, Pages 156-169

  Wagner, J A ^a   Katsch, H M ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC DISCHARGES; FREQUENCIES; INERT GASES; OXYGEN; QUENCHING;

AFTERGLOW; MOLECULAR OXYGEN; NOBLE GAS ATOMS; QUENCH RATES;

NEGATIVE IONS;

EID: 32844458598     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/15/1/022     Document Type: Article

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