SCOPUS 정보 검색 플랫폼

Volumn 34, Issue 18, 2001, Pages 2854-2861

Observation of the transition of operating regions in a low-pressure inductively coupled oxygen plasma by Langmuir probe measurement and optical emission spectroscopy

(2) Seo, D C a Chung, T H a

a Dong A University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; EMISSION SPECTROSCOPY; GROUND STATE; PLASMA PROBES; SPECTRUM ANALYSIS;

LANGMUIR PROBES; OXYGEN PLASMAS;

PLASMAS;

EID: 0035929053 PISSN: 00223727 EISSN: None Source Type: Journal
DOI: 10.1088/0022-3727/34/18/320 Document Type: Article

Times cited : (29)

References (32)

1
- 0030388178
- (1996) Japan. J. Appl. Phys. , vol.35 , pp. 6248
- Aoyagi, K.¹ Ishikawa, I.² Saito, Y.³ Suganomata, S.⁴

2
- 77952974131
- (1988) J. Phys. Soc. Japan , vol.57 , pp. 887
- Amemiya, H.¹

3
- 21544481267
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2622
- Barns, M.S.¹ Forster, J.C.² Keller, J.H.³

4
- 0031359499
- (1997) Surf. Coat. Technol. , vol.97 , pp. 734
- Behle, St.¹ Georg, A.² Yuan, Y.³ Engemann, J.⁴ Brockhaus, A.⁵

5
- 0000275583
- (1959) Proc. R. Soc. A , vol.252 , pp. 102
- Boyd, R.L.F.¹ Thomson, J.B.²

6
- 0024135419
- (1988) J. Phys. D: Appl. Phys. , vol.21 , pp. 1733
- Braithwait, N.St.J.¹ Allen, J.E.²

7
- 0035124938
- (2001) J. Phys. D: Appl. Phys. , vol.34 , pp. 95
- Bryant, P.¹ Dyson, A.² Allen, J.E.³

8
- 0033334589
- (1999) Plasma Sources Sci. Technol. , vol.8 , pp. 561
- Chabert, P.¹ Sheridan, T.E.² Boswell, R.W.³ Perrins, J.⁴

9
- 0000814907
- (1999) J. Appl. Phys. , vol.86 , pp. 3536
- Chung, T.H.¹ Yoon, H.J.² Seo, D.C.³

10
- 0001615991
- (1990) Japan. J. Appl. Phys. , vol.29 , pp. 2165
- Fujimura, S.¹ Shinagawa, K.² Nakamura, M.³ Yano, H.⁴

11
- 0003232786
- Ph.D. Thesis University of California at Berkeley
- (1996)
- Gudmundsson, J.T.¹

12
- 0001333750
- (1998) J. Appl. Phys. , vol.83 , pp. 697
- Hayashi, D.¹ Kadota, K.²

13
- 0000880796
- (2000) J. Appl. Phys. , vol.87 , pp. 7660
- Hebner, G.A.¹ Miller, P.A.²

14
- 0032071532
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2391
- Ishikawa, T.¹ Hayashi, D.² Sasaki, K.³ Kadota, K.⁴

15
- 84951075359
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 2487
- Keller, J.H.¹ Forster, J.C.² Barns, M.S.³

16
- 0029271322
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 368
- Lee, C.¹ Lieberman, M.A.²

17
- 0028448136
- (1994) J. Electrochem. Soc. , vol.141 , pp. 1546
- Lee, C.¹ Graves, D.B.² Lieberman, M.A.³ Hess, D.W.⁴

18
- 0033887581
- (2000) Plasma Sources Sci. Technol. , vol.9 , pp. 45
- Lichtenberg, A.J.¹ Lieberman, M.A.² Kouznetsov, I.G.³ Chung, T.H.⁴

19
- 0003242954
- (1996) Appl. Phys. Lett. , vol.69 , pp. 61
- Mieno, T.¹ Kamo, T.² Hayashi, D.³ Shoji, T.⁴ Kadota, K.⁵

20
- 0000985817
- (2000) J. Appl. Phys. , vol.87 , pp. 8323
- Panda, S.¹ Economou, D.J.² Meyyappan, M.³

21
- 0032070131
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2394
- Quandt, E.¹ Dobele, H.F.² Graham, W.G.³

22
- 21344478801
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 2911
- Ra, Y.¹ Chen, C.H.²

23
- 21344494007
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1328
- Ra, Y.¹ Bradly, S.G.² Chen, C.H.³

24
- 0003102970
- (1998) Rev. Sci. Instrum. , vol.69 , pp. 3176
- Sarfaty, M.¹ Harper, M.² Hershkowitz, N.³

25
- 0035870929
- (2001) J. Appl. Phys. , vol.89 , pp. 4218
- Seo, D.C.¹ Chung, T.H.² Yoon, H.J.³ Kim, G.H.⁴

26
- 21144471247
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 3119
- Shatas, A.A.¹ Hu, Y.Z.² Irene, E.A.³

27
- 0032659380
- (1999) Plasma Sources Sci. Technol. , vol.8 , pp. 457
- Sheridon, T.E.¹ Chabert, P.² Boswell, R.W.³

28
- 0000978827
- Division of Plasma Electronics, The Japan Society of Applied Physics
- (2000) Proc. 17th Symp. Plasma Processing , pp. 259
- Stamate, E.¹ Kimura, T.² Ohe, K.³

29
- 0000041999
- (1995) Phys. Rev. E , vol.51 , pp. 2425
- Stoffels, E.¹ Stoffels, W.W.² Vender, D.³ Kando, M.⁴ Kroesen, G.M.W.⁵ De Hoog, F.J.⁶

30
- 0000438562
- (1996) J. Appl. Phys. , vol.79 , pp. 8967
- Tuszewski, M.¹

31
- 0000805315
- (1998) J. Appl. Phys. , vol.84 , pp. 4731
- Vucelic, M.¹ Mijovic, S.²

32
- 0003234125
- (2001) J. Appl. Phys. , vol.89 , pp. 911
- Yun, S.¹ Tynan, G.R.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.