Charge carrier dynamics in a pulsed inductive RF discharge in oxygen

Plasma Sources Science and Technology

Volumn 12, Issue 3, 2003, Pages 475-483

  Katsch, H M ^a   Manthey, C ^a   Dobele H F ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; ELECTRIC DISCHARGES; ELECTRIC VARIABLES MEASUREMENT; ELECTRON TRAPS; MOLECULAR DYNAMICS; NEGATIVE IONS; OXYGEN; PLASMA COLLISION PROCESSES; PLASMAS;

CHARGE CARRIER DYNAMICS; ION-ION PLASMA; RADIO FREQUENCY DISCHARGES;

CHARGE CARRIERS;

EID: 0042823644     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/3/324     Document Type: Article

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