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Plasma Sources Science and Technology
Volumn 10, Issue 3, 2001, Pages 430-439
Modelling finite cylinder electronegative discharges
(3)
Kimura, T
a
Lichtenberg, A J
b
Lieberman, M A
b
a
NAGOYA INSTITUTE OF TECHNOLOGY
(
Japan
)
b
UNIVERSITY OF CALIFORNIA
(
United States
)
Author keywords
[No Author keywords available]
Indexed keywords
ELECTRONEGATIVE (EN) PLASMAS; ELECTRONEGATIVE DISCHARGES;
ELECTRONS; NEGATIVE IONS; PLASMA APPLICATIONS;
ELECTRIC DISCHARGES;
EID
:
0035418437
PISSN
:
09630252
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1088/0963-0252/10/3/306
Document Type
:
Article
Times cited : (
38
)
References (
16
)
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, vol.77
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1
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4
* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.