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Proceedings - Electrochemical Society

Volumn PV 2005-01, Issue , 2005, Pages 19-32

Angle-resolved photoelectron spectroscopy study on gate insulators

(4) Nohira, H a Tamura, N b Ushio, J c Hattori, T a

a TOKYO CITY UNIVERSITY (Japan)

b FUJITSU LABORATORIES LTD (Japan)

c HITACHI LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); PHOTOELECTRON SPECTROSCOPY; SILICON; SURFACE ROUGHNESS;

INTERFACE ROUGHNESS; NITROGEN ATOMS; OXYNITRIDE FILMS;

ELECTRIC INSULATORS;

EID: 31844443872 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (5)

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