Depth profiling of oxynitride film formed on Si(1 0 0) by photon energy dependent photoelectron spectroscopy

Applied Surface Science

Volumn 216, Issue 1-4 SPEC., 2003, Pages 287-290

  Nishizaki, K ^a   Nohira, H ^a   Takahashi, K ^a   Kamakura, N ^b   Takata, Y ^b   Shin, S ^b   Kobayashi, K ^c   Tamura, N ^d   Hikazutani, K ^d   Hattori, T ^a  

^a TOKYO CITY UNIVERSITY   (Japan)

^b RIKEN   (Japan)

^c JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^d FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Depth profiling; Oxynitride; Photoelectron spectroscopy; Synchrotron radiation

Indexed keywords

NITROGEN; PHOTOELECTRON SPECTROSCOPY; PHOTONS; SILICA; SILICON;

DEPTH PROFILING;

THIN FILMS;

EID: 0037670113     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00389-1     Document Type: Conference Paper

References (12)

1. Hecht M.H., Grunthaner F.J., Pianetta P., Johansson L.I., Lindau I. J. Vac. Sci. Technol. A2:1984;584.
2. H. Kato, K. Takahashi, H. Nohira, N. Tamura, K. Hikazutani, S. Sano, T. Hattori, in: Proceedings of the International Conference on Solid State Devices and Materials, Sendai, 2000, p. 432 (Ext. Abstr.).
3. K. Takahashi, K. Inoue, H. Kato, N. Tamura, K. Hikazutani, S. Sano, T. Hattori, in: Proceedings of the International Conference on Semiconductor Technology, Shanghai, 2001, p. 225.
4. Kato H., Nishizaki K., Takahashi K., Nohira H., Tamura N., Hikazutani K., Sano S., Hattori T. Appl. Surf. Sci. 190:2002;39.
5. K. Nishizaki, H. Nohira, K. Takahashi, N. Tamura, K. Hikazutani, S. Sano, T. Hattori, in: Proceedings of the International Conference on Semiconductor Technology, Tokyo, 2001.
6. 2 Interfaces, Toronto, 2000, p. 181.
7. Inoue K., Furuno K., Kato H., Tanuma N., Hikazutani K., Sano S., Hattori T. Jpn. J. Appl. Phys. 40:2001;L539.
8. Gelius U., Wannberg B., Baltzer P., Fellner-Feldegg H., Carlsson G., Johansson C.G., Larsson J., Munger P., Vergerfos G. J. Electron Spectrosc. Relat. Phenom. 52:1990;747.
9. Nohira H., Hirose K., Takahashi K., Hattori T. Appl. Surf. Sci. 162-163:2000;304.
10. Tanuma S., Powell C.J., Penn D.R. Surf. Interface Anal. 11:1988;577.
11. Seah M.P., Dench W.A. Surf. Interface Anal. 1:1979;2.
12. Yeh J.J., Lindau I. Atomic Data Nuclear Data Tables. 32:1985;1.