Fabrication of multi-layer SU-8 microstructures

Journal of Micromechanics and Microengineering

Volumn 16, Issue 2, 2006, Pages 276-284

  Mata, Alvaro ^a,b   Fleischman, Aaron J ^b   Roy, Shuvo ^b  

^a Cleveland State University   (United States)

^b LERNER RESEARCH INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROSTRUCTURE; PHOTORESISTS; SPIN COATING; ULTRAVIOLET RADIATION;

EXPOSURE STEPS; PHOTORESIST FILMS; POST-EXPOSURE; SEQUENTIAL PROCESSING;

MULTILAYERS;

EID: 31344471503     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/2/012     Document Type: Article

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