Microstructure and nanohardness properties of Zr-Al-N and Zr-Cr-N thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 593-598

  Lamni, R ^a   Sanjins R ^a   Parlinska Wojtan, M ^a   Karimi, A ^a   Lvy F ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; ELASTIC MODULI; HARDNESS; MAGNETRON SPUTTERING; MICROANALYSIS; MICROSTRUCTURE; TEXTURES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

NANOHARDNESS; STRESS-FREE LATTICE; ZR-CR-N THIN FILMS;

ZIRCONIUM ALLOYS;

EID: 31044450090     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1924579     Document Type: Article

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