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Applied Physics A: Materials Science and Processing

Volumn 73, Issue 4, 2001, Pages 441-450

ZrN, ZrxAlyN and ZrxGayN thin films-novel materials for hard coatings grown using pulsed laser deposition

(4) Spillmann, H a Willmott, P R a Morstein, M b Uggowitzer, P J b

a UNIVERSITY OF ZURICH (Switzerland)

b ETH ZURICH (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL IMPURITIES; CRYSTAL STRUCTURE; CRYSTALLOGRAPHY; FILM GROWTH; LASER ABLATION; POLYCRYSTALLINE MATERIALS; PROTECTIVE COATINGS; PULSED LASER DEPOSITION; SILICON; STAINLESS STEEL; TRIBOLOGY; ZIRCONIUM COMPOUNDS;

CRYSTALLINITY; DIFFERENTIAL SCATTERING; HARD COATINGS; PULSED REACTIVE CROSS BEAM LASER ABLATION;

THIN FILMS;

EID: 0035477617 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390100780 Document Type: Article

Times cited : (47)

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