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Thin Solid Films

Volumn 398, Issue 399, 2001, Pages 460-464

Composition, structure, and nanomechanical properties of DC-sputtered CrNx (0≤x≤1) thin films

(3) Wei, G a Rar, A a Barnard, J A b

a University of Alabama (United States)

b University of Pittsburgh (United States)

Author keywords

Annealing; Chromium nitride; Nanoindentation hardness; X Ray diffraction

Indexed keywords

ANNEALING; CHROMIUM COMPOUNDS; CRYSTAL STRUCTURE; MAGNETRON SPUTTERING; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOINDENTATION HARDNESS;

THIN FILMS;

EID: 0035506137 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01388-8 Document Type: Article

Times cited : (66)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.