SCOPUS 정보 검색 플랫폼

Volumn 133-134, Issue , 2000, Pages 289-294

Study of preferred orientation of vanadium nitride and zirconium nitride coatings on silicon prepared by ion beam assisted deposition

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ION BEAMS; NITRIDES; VANADIUM COMPOUNDS; ZIRCONIUM COMPOUNDS;

VANADIUM NITRIDE; ZIRCONIUM NITRIDE;

CERAMIC COATINGS;

COATING; SPUTTERING; TOPOGRAPHY; WEAR PREVENTION;

EID: 0034513326 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(00)00936-1 Document Type: Article

Times cited : (59)

References (17)

1
- 0032665645
- J.-H. Huang, C.-H. Lin, H. Chen, Mater. Chem. Phys. 59 (1999) 49.
- (1999) Mater. Chem. Phys. , vol.59 , pp. 49
- Huang, J.-H.¹ Lin, C.-H.² Chen, H.³

2
- 0033885644
- J.-H. Huang, C.-H. Lin, C.-H. Ma, H. Chen, Scripta Mater. 42 (2000) 573.
- (2000) Scripta Mater. , vol.42 , pp. 573
- Huang, J.-H.¹ Lin, C.-H.² Ma, C.-H.³ Chen, H.⁴

3
- 0022080421
- J.-E. Sundgren, Thin Solid Films 128 (1985) 21.
- (1985) Thin Solid Films , vol.128 , pp. 21
- Sundgren, J.-E.¹

4
- 0031147325
- J.H. Je, D.Y. Noh, H.K. Kim, K.S. Liang, J. Appl. Phys. 81 (9) (1997) 6126.
- (1997) J. Appl. Phys. , vol.81 , Issue.9 , pp. 6126
- Je, J.H.¹ Noh, D.Y.² Kim, H.K.³ Liang, K.S.⁴

5
- 21544469498
- J.E. Greene, J.-E. Sundgren, L. Hultman, I. Petrov, D.B. Bergstrom, Appl. Phys. Lett. 67 (20) (1995) 2928.
- (1995) Appl. Phys. Lett. , vol.67 , Issue.20 , pp. 2928
- Greene, J.E.¹ Sundgren, J.-E.² Hultman, L.³ Petrov, I.⁴ Bergstrom, D.B.⁵

6
- 36449001627
- L. Hultman, J.-E. Sundgren, J.E. Greene, D.B. Bergstrom, I. Petrov, J. Appl. Phys. 78 (9) (1995) 5395.
- (1995) J. Appl. Phys. , vol.78 , Issue.9 , pp. 5395
- Hultman, L.¹ Sundgren, J.-E.² Greene, J.E.³ Bergstrom, D.B.⁴ Petrov, I.⁵

7
- 0001291540
- J.W. Gerlach, U. Preckwinkel, H. Wengenmair, T. Kraus, B. Rauschenbach, Appl. Phys. Lett. 68 (17) (1996) 2360.
- (1996) Appl. Phys. Lett. , vol.68 , Issue.17 , pp. 2360
- Gerlach, J.W.¹ Preckwinkel, U.² Wengenmair, H.³ Kraus, T.⁴ Rauschenbach, B.⁵

8
- 0026120399
- J. Pelleg, L.Z. Zevin, S. Lungo, N. Croitora, Thin Solid Films 197 (1991) 117.
- (1991) Thin Solid Films , vol.197 , pp. 117
- Pelleg, J.¹ Zevin, L.Z.² Lungo, S.³ Croitora, N.⁴

9
- 0041495999
- W. Ensinger, B. Rauschenbach, Nucl. Instrum. Methods Phys. Res. B 80/81 (1993) 1409.
- (1993) Nucl. Instrum. Methods Phys. Res. B , vol.80-81 , pp. 1409
- Ensinger, W.¹ Rauschenbach, B.²

10
- 0006444791
- W. Ensinger, Nucl. Instrum. Methods Phys. Res. B 106 (1995) 1409.
- (1995) Nucl. Instrum. Methods Phys. Res. B , vol.106 , pp. 1409
- Ensinger, W.¹

11
- 0006712597
- L. Hultmann, J.-E. Sundgren, J. Appl. Phys. 66 (1989) 536.
- (1989) J. Appl. Phys. , vol.66 , pp. 536
- Hultmann, L.¹ Sundgren, J.-E.²

12
- 0000564539
- T.C. Chou, J. Appl. Phys. 67 (1990) 2670.
- (1990) J. Appl. Phys. , vol.67 , pp. 2670
- Chou, T.C.¹

13
- 0006409874
- M. Kiuchi, K. Fujii, T. Tanaka, M. Satou, F. Fujimoto, Nucl. Instrum. Methods Phys. Res. B 33 (1988) 647.
- (1988) Nucl. Instrum. Methods Phys. Res. B , vol.33 , pp. 647
- Kiuchi, M.¹ Fujii, K.² Tanaka, T.³ Satou, M.⁴ Fujimoto, F.⁵

14
- 0024620943
- Y. Andoh, K. Ogata, H. Yamak, S. Sakai, Nucl. Instrum. Methods Phys. Res. B 39 (1989) 158.
- (1989) Nucl. Instrum. Methods Phys. Res. B , vol.39 , pp. 158
- Andoh, Y.¹ Ogata, K.² Yamak, H.³ Sakai, S.⁴

15
- 0003024745
- H. Jiang, K. Tao, H. Li, Thin Solid Films 258 (1995) 51.
- (1995) Thin Solid Films , vol.258 , pp. 51
- Jiang, H.¹ Tao, K.² Li, H.³

16
- 0031547708
- W. Ensinger, Nucl. Instrum. Methods Phys. Res. B 127/128 (1997) 796.
- (1997) Nucl. Instrum. Methods Phys. Res. B , vol.127-128 , pp. 796
- Ensinger, W.¹

17
- 0015206803
- M. Ohring, R. Rosenberg, J. Appl. Phys. 42 (1971) 5671.
- (1971) J. Appl. Phys. , vol.42 , pp. 5671
- Ohring, M.¹ Rosenberg, R.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.