Comprehensive analysis of chlorine-containing capacitively coupled plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 3, 2005, Pages 369-387

  Franz, Gerhard ^a  

^a MUNICH UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; ELECTRON RESONANCE; HEATING; INDUCTIVELY COUPLED PLASMA; OHMIC CONTACTS; PLASMA DENSITY; TEMPERATURE DISTRIBUTION;

ELECTRON TEMPERATURE; OHMIC HEATING; OPTICAL EMISSION SPECTROSCOPY (OES);

CHLORINE;

EID: 31044436536     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1894725     Document Type: Review

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