Ion energy and angular distributions in inductively driven radio frequency discharges in chlorine

Journal of Applied Physics

Volumn 81, Issue 9, 1997, Pages 5950-5959

  Woodworth, J R ^a   Riley, M E ^a   Miller, P A ^a   Hebner, G A ^a   Hamilton, T W ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Applied Physics International   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001704693     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364383     Document Type: Article

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