Metastable chlorine ion kinetics in inductively coupled plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 5, 1997, Pages 2698-2708

  Hebner, G A ^a   Fleddermann, C B ^a,b   Miller, P A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of NewMexico   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHLORINE; ELECTRODES; FLUORESCENCE; KINETIC THEORY; LASER APPLICATIONS; PLASMAS; PROBES; TEMPERATURE MEASUREMENT; VELOCITY MEASUREMENT;

BIAS VOLTAGE; LANGMUIR PROBE; RADIAL DRIFT VELOCITY; RELATIVE NUMBER DENSITY;

IONS;

EID: 0031222445     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580944     Document Type: Article

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