Organic airborne molecular contamination in semiconductor fabrication clean rooms

Journal of the Electrochemical Society

Volumn 153, Issue 2, 2006, Pages

  Den, Walter ^a   Bai, Hsunling ^b   Kang, Yuhao ^b  

^a TUNGHAI UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL CLEANING; CLEAN ROOMS; DEPOSITION; MATHEMATICAL MODELS; POLLUTION CONTROL EQUIPMENT; SEMICONDUCTING ORGANIC COMPOUNDS; SEMICONDUCTOR DEVICES;

AIRBORNE MOLECULAR CONTAMINATION (AMC); CHEMICAL FILTRATION TECHNOLOGY; SEMICONDUCTOR FABRICATION CLEAN ROOMS; SURFACE ANALYTICAL METHODS;

AIR POLLUTION;

EID: 30644475716     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2147286     Document Type: Article

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