Rate theory of multicomponent adsorption of organic species on silicon wafer surface

Journal of the Electrochemical Society

Volumn 147, Issue 6, 2000, Pages 2319-2323

  Habuka, Hitoshi ^a   Shimada, Manabu ^b   Okuyama, Kikuo ^b  

^a SHIN ETSU CHEMICAL CO LTD   (Japan)

^b HIROSHIMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CONTAMINATION; DESORPTION; ESTERS; GAS CHROMATOGRAPHY; MASS SPECTROMETRY; MATHEMATICAL MODELS; SILANES; SURFACES;

DIETHYLHEXYL PHTHALATE; ORGANIC SPECIES; PROPIONIC ACID ESTER; RATE THEORY; SILOXANE;

SILICON WAFERS;

EID: 0034206015     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393527     Document Type: Article

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