Organic contamination: Purge gas impact in plastic storage boxes

Solid State Phenomena

Volumn 92, Issue , 2003, Pages 105-108

  Veillerot, M ^a   Daniel, A ^a   Marthon, S ^a   Tardif, F ^a  

^a CEA GRENOBLE   (France)

Author keywords

Airborne molecular contamination; Electrical performances; Gate oxide

Indexed keywords

CONTAMINATION; DEGASSING; DEPOSITION; POLYSILICON; SILICON WAFERS; STORAGE (MATERIALS); AIR PURIFICATION; GATES (TRANSISTOR);

AIRBORNE MOLECULAR CONTAMINATION; GATE OXIDE; ORGANIC CONTAMINATION; PLASTIC STORAGE BOXES; PURGE GAS IMPACT; ELECTRICAL PERFORMANCE; INTRINSIC PERFORMANCE; MATERIAL OUTGASSING; POLYSILICON DEPOSITION; STATIC CONDITIONS;

GASES; STORAGE (MATERIALS);

EID: 0038745325     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.92.105     Document Type: Conference Paper

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4. M. Veillerot, A. Danel, S. Cetre, F. Tardif, E-MRS 2002, Strasbourg (2002).