Airborne organic contamination behavior on silicon wafer surface

Journal of the Electrochemical Society

Volumn 150, Issue 2, 2003, Pages

  Habuka, Hitoshi ^a   Ishiwari, Syuichi ^b   Kato, Haruo ^b   Shimada, Manabu ^c   Okuyama, Kikuo ^c  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

^c HIROSHIMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CONTAMINATION; DESORPTION; GAS CHROMATOGRAPHY; MASS SPECTROMETRY; SURFACE PROPERTIES;

SILICON PLATE SAMPLING METHOD (SPM);

SILICON WAFERS;

EID: 0037326634     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1536181     Document Type: Article

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