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Volumn 43, Issue 5 A, 2004, Pages 2661-2666

Adsorption and desorption of dibutyl phthalate on Si surface measured in controlled atmosphere using quartz crystal microbalance method

Author keywords

Adsorption site; Decomposition analysis; Desorption time constant; Dibutyl phthalate; Quartz crystal miorobalance (QCM); Sliding chamber

Indexed keywords

ADSORPTION; DEHYDRATION; DESORPTION; ORGANIC COMPOUNDS; REACTION KINETICS; SURFACE REACTIONS;

ADSORPTION SITE; DESORPTION TIME CONSTANT; DIBUTYL PHTHALATES; QUARTZ CRYSTAL MICROBALANCE (QCM); SLIDING CHAMBERS;

SEMICONDUCTING SILICON;

EID: 3142708062 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.2661 Document Type: Article

Times cited : (10)

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