Evaluation of outgassing compounds from cleanroom construction materials

Journal of the IEST

Volumn 44, Issue 1, 2001, Pages 28-32

  Takeda, Kikuo ^a   Mochizuki, Ai ^a   Nonaka, Tatsuo ^a   Matsumoto, Ikuko ^a   Fujimoto, Taketoshi ^a   Nakahara, Taketoshi ^b  

^a Sumika Chemicals Analysis Service Ltd   (Japan)

^b Osaka Prefecture University   (Japan)

Author keywords

Cleanroom; Cleanroom construction materials; Dynamic headspace sampling; Gas chromatography mass spectrometry; Organic contamination; Outgassing

Indexed keywords

BUILDING MATERIALS; DEGASSING; ESTIMATION; GAS CHROMATOGRAPHY; MASS SPECTROMETRY; POLYMERS; SAMPLING; THERMAL EFFECTS;

CLEANROOM CONSTRUCTION MATERIALS; OUTGASSING COMPOUNDS;

ORGANIC COMPOUNDS;

EID: 0035550944     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: 10.17764/jiet.44.1.u17p0l7l3xhu5115     Document Type: Conference Paper

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