Evaluation of organic contamination in cleanroom and deposition onto wafer surface

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1998, Pages 556-561

  Takeda, Kikuo ^a   Nonaka, Tatsuo ^a   Sakamoto, Yasuko ^a   Taira, Toshikazu ^a   Hirono, Koichi ^a   Fujimoto, Taketoshi ^a   Suwa, Nobuyuki ^a   Otsuka, Kazuhiko ^a  

^a Sumika Chemical Analysis Service   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CLEAN ROOMS; IMPURITIES; MASS SPECTROMETRY; PROBABILITY; SILICON WAFERS; SURFACES; TRACE ANALYSIS;

ORGANIC CONTAMINATION; STICKING PROBABILITY; WAFER SURFACE;

CONTAMINATION;

EID: 0031631167     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)