Real-time methodologies for monitoring airborne molecular contamination in modern DUV photolithography facilities

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue I, 1999, Pages 348-376

  Kishkovich, Oleg ^a   Kinkead, Devon ^a   Higley, John ^a   Kerwin, Robert ^a   Piatt, John ^a  

^a Franklin Primary Health Center   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMINES; AMMONIA; IMPURITIES; REAL TIME SYSTEMS;

AIRBORNE MOLECULAR CONTAMINATION;

PHOTORESISTS;

EID: 0032663125     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350824     Document Type: Conference Paper

References (14)