-
1
-
-
33746007676
-
-
P. Morgen, F. K-. Dam, C. Gundlach, T. Jensen, L. B. Tækker, S. Tougaard, and K. Pedersen, Recent Research Developments in Appl. Phys.; Transworld Research Network, 5, 287 (2002).
-
(2002)
Recent Research Developments in Appl. Phys.; Transworld Research Network
, vol.5
, pp. 287
-
-
Morgen, P.1
Dam, F.K.2
Gundlach, C.3
Jensen, T.4
Tækker, L.B.5
Tougaard, S.6
Pedersen, K.7
-
2
-
-
0031150209
-
-
MIENEF 0167-9317 10.1016/S0167-9317(97)00007-5
-
D. A. Buchanan and S. H. Lo, Microelectron. Eng. MIENEF 0167-9317 10.1016/S0167-9317(97)00007-5 36, 13 (1997).
-
(1997)
Microelectron. Eng.
, vol.36
, pp. 13
-
-
Buchanan, D.A.1
Lo, S.H.2
-
3
-
-
29744461281
-
-
JVTAD6 0734-2101 10.1116/1.1842113
-
P. Morgen, A. Bahari, U. Robenhagen, J. Andersen, K. Hansen, K. Pedersen, M. G. Rao, and Z. S. Li, J. Vac. Sci. Technol. A JVTAD6 0734-2101 10.1116/1.1842113 23 (1), 201 (2005).
-
(2005)
J. Vac. Sci. Technol. a
, vol.23
, Issue.1
, pp. 201
-
-
Morgen, P.1
Bahari, A.2
Robenhagen, U.3
Andersen, J.4
Hansen, K.5
Pedersen, K.6
Rao, M.G.7
Li, Z.S.8
-
4
-
-
0034225418
-
-
IETDAI 0018-9383 10.1109/16.848279
-
K. Sekine, Y. Saito, M. Hirayma, and T. Ohmi, IEEE Trans. Electron Devices IETDAI 0018-9383 10.1109/16.848279 47, 1370 (2000).
-
(2000)
IEEE Trans. Electron Devices
, vol.47
, pp. 1370
-
-
Sekine, K.1
Saito, Y.2
Hirayma, M.3
Ohmi, T.4
-
5
-
-
0005873559
-
-
APPLAB 0003-6951 10.1063/1.112703
-
S. B. Kang, S. O. Kim, J. S. Byun, and H. J. Kim, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.112703 65, 2448 (1994).
-
(1994)
Appl. Phys. Lett.
, vol.65
, pp. 2448
-
-
Kang, S.B.1
Kim, S.O.2
Byun, J.S.3
Kim, H.J.4
-
6
-
-
33750858625
-
-
APPLAB 0003-6951 10.1063/1.111701
-
M. Bhat, G. W. Yoon, J. Kim, and D. L. Kwong, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.111701 64, 2116 (1994).
-
(1994)
Appl. Phys. Lett.
, vol.64
, pp. 2116
-
-
Bhat, M.1
Yoon, G.W.2
Kim, J.3
Kwong, D.L.4
-
8
-
-
0032663466
-
-
IBMJAE 0018-8646
-
G. Lucovsky, IBM J. Res. Dev. IBMJAE 0018-8646 43, 301 (1999).
-
(1999)
IBM J. Res. Dev.
, vol.43
, pp. 301
-
-
Lucovsky, G.1
-
9
-
-
36449009207
-
-
APPLAB 0003-6951 10.1063/1.113461
-
R. I. Hegde, P. J. Tobin, K. Tao, and S. A. Ajuria, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.113461 66, 2882 (1996).
-
(1996)
Appl. Phys. Lett.
, vol.66
, pp. 2882
-
-
Hegde, R.I.1
Tobin, P.J.2
Tao, K.3
Ajuria, S.A.4
-
11
-
-
0027606925
-
-
JAPNDE 0021-4922 10.1143/JJAP.32.2794
-
A. Masuda, I. Fukushi, Y. Yonezawa, A. Morimoto, M. Kumeda, and T. Shimizu, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 10.1143/JJAP.32.2794 32, 2794 (1993).
-
(1993)
Jpn. J. Appl. Phys., Part 1
, vol.32
, pp. 2794
-
-
Masuda, A.1
Fukushi, I.2
Yonezawa, Y.3
Morimoto, A.4
Kumeda, M.5
Shimizu, T.6
-
12
-
-
0036693572
-
-
SIANDQ 0142-2421 10.1002/sia.1337
-
Osamu Jintsugawa, M. Sakuraba, T. Matsuura, and J. Murota, Surf. Interface Anal. SIANDQ 0142-2421 10.1002/sia.1337 34, 456 (2002).
-
(2002)
Surf. Interface Anal.
, vol.34
, pp. 456
-
-
Jintsugawa, O.1
Sakuraba, M.2
Matsuura, T.3
Murota, J.4
-
13
-
-
0032683840
-
-
IBMJAE 0018-8646
-
G. R. Guusev, H. C. Lu, E. L. Garfunkel, T. Gustafsson, and M. L. Green, IBM J. Res. Dev. IBMJAE 0018-8646 43, 265 (1999).
-
(1999)
IBM J. Res. Dev.
, vol.43
, pp. 265
-
-
Guusev, G.R.1
Lu, H.C.2
Garfunkel, E.L.3
Gustafsson, T.4
Green, M.L.5
-
15
-
-
36449005856
-
-
JAPIAU 0021-8979 10.1063/1.356091
-
P. J. Tobin, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.356091 75, 3548 (1994).
-
(1994)
J. Appl. Phys.
, vol.75
, pp. 3548
-
-
Tobin, P.J.1
-
16
-
-
0000749084
-
-
APPLAB 0003-6951 10.1063/1.111220
-
Z. Q. Yao, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.111220 64, 3548 (1994).
-
(1994)
Appl. Phys. Lett.
, vol.64
, pp. 3548
-
-
Yao, Z.Q.1
-
17
-
-
0009681347
-
-
JAPIAU 0021-8979 10.1063/1.345465
-
Y. Yasuda, S. Zaima, T. Kaida, and Y. Koide, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.345465 67, 2603 (1990).
-
(1990)
J. Appl. Phys.
, vol.67
, pp. 2603
-
-
Yasuda, Y.1
Zaima, S.2
Kaida, T.3
Koide, Y.4
-
18
-
-
4344649991
-
-
JVTAD6 0734-2101 10.1116/1.1759355
-
X. Shi, M. Shriver, Z. Zhang, T. Higman, and S. A. Campbell, J. Vac. Sci. Technol. A JVTAD6 0734-2101 10.1116/1.1759355 22, 1146 (2004).
-
(2004)
J. Vac. Sci. Technol. a
, vol.22
, pp. 1146
-
-
Shi, X.1
Shriver, M.2
Zhang, Z.3
Higman, T.4
Campbell, S.A.5
-
19
-
-
0000556993
-
-
JAPIAU 0021-8979 10.1063/1.360500
-
D. G. J. Sutherland, H. Akatsu, M. Copel, and F. J. Himpsel, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.360500 78, 6761 (1995).
-
(1995)
J. Appl. Phys.
, vol.78
, pp. 6761
-
-
Sutherland, D.G.J.1
Akatsu, H.2
Copel, M.3
Himpsel, F.J.4
-
20
-
-
0034187380
-
-
JVTBD9 1071-1023 10.1116/1.591472
-
J. Robertson, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.591472 18, 1785 (2000).
-
(2000)
J. Vac. Sci. Technol. B
, vol.18
, pp. 1785
-
-
Robertson, J.1
-
21
-
-
0038007895
-
-
ASUSEE 0169-4332 10.1016/S0169-4332(03)00423-9
-
I. Ohshima, W. Cheng, Y. Ono, M. Higuchi, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, Appl. Surf. Sci. ASUSEE 0169-4332 10.1016/S0169-4332(03) 00423-9 216, 246 (2003).
-
(2003)
Appl. Surf. Sci.
, vol.216
, pp. 246
-
-
Ohshima, I.1
Cheng, W.2
Ono, Y.3
Higuchi, M.4
Hirayama, M.5
Teramoto, A.6
Sugawa, S.7
Ohmi, T.8
-
22
-
-
0036508455
-
-
IBMJAE 0018-8646
-
J. H. Stathis, IBM J. Res. Dev. IBMJAE 0018-8646 46, 265 (2002).
-
(2002)
IBM J. Res. Dev.
, vol.46
, pp. 265
-
-
Stathis, J.H.1
-
23
-
-
11644283926
-
-
SUSCAS 0039-6028 10.1016/0039-6028(85)90753-8
-
K. Takayanagi, Y. Tanishiro, S. Takahashi, and M. Takahashi, Surf. Sci. SUSCAS 0039-6028 10.1016/0039-6028(85)90753-8 164, 367 (1985).
-
(1985)
Surf. Sci.
, vol.164
, pp. 367
-
-
Takayanagi, K.1
Tanishiro, Y.2
Takahashi, S.3
Takahashi, M.4
-
24
-
-
84856132107
-
-
D. Adams and J. N. Andersen, FITXPS: A fitting program for core-level spectra available from: http://www.sljus.lu.se/download.html
-
-
-
Adams, D.1
Andersen, J.N.2
-
25
-
-
0037438265
-
-
PRBMDO 0163-1829 10.1103/PhysRevB.67.035304
-
J. W. Kim and H. W. Yeom, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.67.035304 67, 035304 (2003).
-
(2003)
Phys. Rev. B
, vol.67
, pp. 035304
-
-
Kim, J.W.1
Yeom, H.W.2
-
26
-
-
3343006353
-
-
PRBMDO 0163-1829 10.1103/PhysRevB.38.6084
-
F. J. Himpsel, F. R. McFeely, A. Taleb-Ibrahimi, J. A. Yarmoff, and G. Hollinger, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.38.6084 38, 6084 (1988).
-
(1988)
Phys. Rev. B
, vol.38
, pp. 6084
-
-
Himpsel, F.J.1
McFeely, F.R.2
Taleb-Ibrahimi, A.3
Yarmoff, J.A.4
Hollinger, G.5
-
27
-
-
4143127317
-
-
JNCSBJ 0022-3093 10.1016/0022-3093(95)00121-2
-
S. Nedelec, D. Mathiot, M. Gauneau, and A. Straboni, J. Non-Cryst. Solids JNCSBJ 0022-3093 10.1016/0022-3093(95)00121-2 187, 106 (1995).
-
(1995)
J. Non-Cryst. Solids
, vol.187
, pp. 106
-
-
Nedelec, S.1
Mathiot, D.2
Gauneau, M.3
Straboni, A.4
-
28
-
-
21544470315
-
-
APPLAB 0003-6951 10.1063/1.103550
-
H. Hwang, W. Ting, B. Matiti, D. L. Kwong, and J. Lee, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.103550 57, 1010 (1990).
-
(1990)
Appl. Phys. Lett.
, vol.57
, pp. 1010
-
-
Hwang, H.1
Ting, W.2
Matiti, B.3
Kwong, D.L.4
Lee, J.5
-
30
-
-
0028728489
-
-
SUSCAS 0039-6028 10.1016/0039-6028(94)90032-9
-
J. Stober, B. Eisenhut, G. Rangelov, and Th. Fauster, Surf. Sci. SUSCAS 0039-6028 10.1016/0039-6028(94)90032-9 321, 111 (1994).
-
(1994)
Surf. Sci.
, vol.321
, pp. 111
-
-
Stober, J.1
Eisenhut, B.2
Rangelov, G.3
Fauster, Th.4
-
31
-
-
4344602181
-
-
ASUSEE 0169-4332 10.1016/j.apsusc.2004.02.065
-
V. M. Bermudez and F. K. Perkins, Appl. Surf. Sci. ASUSEE 0169-4332 10.1016/j.apsusc.2004.02.065 235, 406 (2004).
-
(2004)
Appl. Surf. Sci.
, vol.235
, pp. 406
-
-
Bermudez, V.M.1
Perkins, F.K.2
|