Surface and interface structures of epitaxial silicon nitride on Si(111)

Physical Review B - Condensed Matter and Materials Physics

Volumn 67, Issue 3, 2003, Pages

  Kim, Jeong Won ^a   Yeom, Han Woong ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON NITRIDE;

ARTICLE; FILM; MODEL; STRUCTURE ANALYSIS; SURFACE PROPERTY; SYNCHROTRON; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0037438265     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.67.035304     Document Type: Article

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